Silicon Wafer Polishing Holder

***New Product For Licensing, Manufacturing, and/or Investors***

U.S. Patents: # 6,612,905, #6,645,049, # 6,666,948, # 6,733,367

Inventor : Phuong Van Nguyen

As attorney for the inventor of the innovative Silicon Wafer Polishing Holder we are currently seeking manufacturing companies to license, purchase patent rights or enter into a royalty agreement for this timely invention.

The Silicon Wafer Polishing Holder relates generally to devices for polishing workpieces and more specifically to a device for polishing silicon wafers including a planar template having a plurality of cavities wherein a silicon wafer is placed for polishing to a thickness equivalent to the depth of the template cavity.

Objects of the present invention:

Now for the first time this unique product is available for millions of potential users.


LIST OF REFERENCE NUMERALS
10 present invention
12rotating pneumatic heads36 mainplate
14 lapping and polishing surface 38 base of cavity
16workpiece template40 mylar layer
18 tube 42 adhesive layer
20supple of moistening liquid44 aperture in main disk
22 top side of lapping and polishing surface 46 adhesive layer
24arrows indicating rotation of the rotating pneumatic head48 holding disk
26 cavity within workpiece template 50 wafer
28bottom surface of workpiece template52 portion of wafer remaining after lapping and polishing
30 shim 54 portion of wafer removed by lapping and polishing
32top side of the workpiece template56 plurality of grooves extending along the top surface of main plate
34 backing plate 58 center of workpiece template

PATENT DRAWINGS
patent drawing
FIGURE 1

Figure 1 is a perspective view of the silicon wafer polishing holder of the present invention.

patent drawing
FIGURE 2

Figure 2 is a bottom side view of a workpiece template used with the silicon wafer polishing holder.

patent drawing
FIGURE 3

Figure 3 is a perspective view of the workpiece template of the present invention.

patent drawing
FIGURE 4

Figure 4 is a cross sectional view of the workpiece of the present invention.

patent drawing
FIGURE 5

Figure 5 is an exploded view of the workpiece template of the present invention.

patent drawing
FIGURE 6

Figure 6 is a top exploded view of a holding disk of the present invention.

patent drawing
FIGURE 7

Figure 7 is a perspective view of a plurality of color-coded shims for use with the present invention.

patent drawing
FIGURE 8

Figure 8 is an exploded view of the workpiece cavity of the silicon wafer polishing holder.

patent drawing
FIGURE 9

Figure 9 is an exploded view of a workpiece cavity of the silicon wafer polishing holder of the present invention including a shim positioned therein for adjusting the depth of the cavity.

patent drawing
FIGURE 10

Figure 10 is an exploded view of the workpiece cavity including a plurality of shims positioned therein for adjusting the depth of the cavity.

patent drawing
FIGURE 11

Figure 11 is a bottom side view of the workpiece template showing workpiece cavities in exploded form.

patent drawing
FIGURE 12

Figure 12 is a cross-sectional view of a workpiece cavity of the silicon wafer polishing holder of the present invention.

patent drawing
FIGURE 13

Figure 13 is a cross-sectional side view of the silicon wafer polishing holder of the present invention including more than one shim within the cavity.

patent drawing
FIGURE 14

Figure 14 is a bottom side view of the workpiece template of the present invention.

patent drawing
FIGURE 15

Figure 15 is a bottom side view of an alternate workpiece template embodiment for use within the silicon wafer polishing holder of the present invention.

patent drawing
FIGURE 16

Figure 16 is a perspective view of an alternate embodiment of the silicon wafer polishing holder of the present invention.

If you are interested in licensing, purchasing the rights to the above invention or entering into a royalty agreement please contact the office of Michael I. Kroll as follows:

Michael I. Kroll
80 Skyline Drive, Suite 304
Plainview, New York 11803
Tel. #: 800-367-7774
Tel. #: 516-367-7777
Fax #: 800-367-7999
Fax #: 516-802-0510
E-Mail patent@invention.net

patent attorney home page